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LIGA is a German acronym for ''Lithographie, Galvanoformung, Abformung'' (Lithography, Electroplating, and Molding) that describes a fabrication technology used to create high-aspect-ratio microstructures. ==Overview== The LIGA consists of three main processing steps; lithography, electroplating and molding. There are two main LIGA-fabrication technologies, X-Ray LIGA, which uses X-rays produced by a synchrotron to create high-aspect ratio structures, and UV LIGA, a more accessible method which uses ultraviolet light to create structures with relatively low aspect ratios. The notable characteristics of X-ray LIGA-fabricated structures include: * high aspect ratios on the order of 100:1 * parallel side walls with a flank angle on the order of 89.95° * smooth side walls with = , suitable for optical mirrors * structural heights from tens of micrometers to several millimeters * structural details on the order of micrometers over distances of centimeters 抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』 ■ウィキペディアで「LIGA」の詳細全文を読む スポンサード リンク
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