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Microscanner : ウィキペディア英語版 | Microscanner A microscanner (or ''micro-scanning mirror'') is a micro-opto-electromechanical system (MOEMS) in the category of micro-mirror actuators for dynamic light modulation. Depending upon the type of microscanner the modulatory movement of a single mirror can be either translatory or rotational, on one or two axes. In the first case, a phase shifting effect takes place. In the second case, the incident light wave is deflected. Therefore, they have to be differentiated from spatial light modulators, other micro-mirror actuators which need a matrix of individually addressable mirrors for their mode of operation. If a single array mirror already fulfils the desired modulation but is operated in parallel with other array mirrors in order to increase the light yield, then the term microscanner array is used. ==Characteristics==
Common chip dimensions are 4 mm × 5 mm for mirror diameters between 1 and 3 mm.〔''(VarioS®Mikroscanner Construction Kit ).'' Fraunhofer Institute for Photonic Microsystems IPMS (Product Description).〕 However larger mirror apertures with side measurements of up to approx. 10 mm × 3 mm can also be produced. The scan frequencies depend upon the design and mirror size and range between 0.1 and 50 kHz. The deflection movement is either resonant or quasi-static. With microscanners that are capable of tilting movement, light can be directed over a projection plane. Many applications requires that a surface is addressed instead of only a single line. For double resonant operation, which results in sinusoidal scan motion, a Lissajous pattern is written. Mechanical deflection angles of such micro scanning devices reach up to ±30°. With translational (piston type) microscanners a mechanical stroke of up to approx. ±500 µm can be attained. This configuration is energy efficient, but requires complicated control electronics. For high end display applications the common choice is raster scanning, where a resonant scanner (for the longer display dimension) is paired with quasi-static scanner (for the shorter dimension).〔
抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)』 ■ウィキペディアで「Microscanner」の詳細全文を読む
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