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Profilometer is a measuring instrument used to measure a surface's profile, in order to quantify its roughness. While the historical notion of a profilometer was a device similar to a phonograph that measures a surface as the surface is moved relative to the contact profilometer's stylus, this notion is changing with the emergence of numerous non-contact profilometery techniques. ==Types== ;Optical methods〔Jean M. Bennett, Lars Mattsson, Introduction to Surface Roughness and Scattering, Optical Society of America, Washington, D.C.〕〔W J Walecki, F Szondy and M M Hilali, "Fast in-line surface topography metrology enabling stress calculation for solar cell manufacturing for throughput in excess of 2000 wafers per hour" 2008 Meas. Sci. Technol. 19 025302 (6pp) 〕 *Digital holographic microscopy *Vertical scanning interferometry / White light interferometry *Phase shifting interferometry *Differential interference contrast microscopy (Nomarski microscopy) *Focus detection methods * *Intensity detection * *Focus variation * *Differential detection * *Critical angle method * *Astigmatic Method * *Foucault method * *Confocal microscopy *Pattern projection methods * *Fringe projection * *Fourier profilometry * *Moire * *Pattern reflection methods〔(Nanoradian Probe )〕 ;Contact and pseudo-contact methods〔〔 *Stylus profilometer (mechanical profilometer) *Atomic Force Microscopy *Scanning Tunneling Microscopy 抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』 ■ウィキペディアで「Profilometer」の詳細全文を読む スポンサード リンク
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