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|Section2= |Section7= }} Tetrakis(dimethylamino)titanium (TDMAT) is a chemical compound. The compound is generally classified as a metalorganic species, meaning that its properties are strongly influenced by the organic ligands but the compound lacks metal-carbon bonds. It is used in chemical vapor deposition to prepare titanium nitride (TiN) surfaces. The prefix "tetrakis" refers the presence of four of the same ligand, in this case dimethylamides. ==Preparation and properties== Tetrakis(dimethylamino)titanium is a conventional Ti(IV) compound in the sense that it is tetrahedral and diamagnetic. Unlike the many alkoxides, the diorganoamides of titanium are monomeric and thus at least somewhat volatile. It is prepared from titanium tetrachloride (which is also tetrahedral, diamagnetic, and volatile) by treatment with lithium dimethylamide:〔D. C. Bradley and I. M. Thomas, "Part I. Metallo-organic Compounds containing Metal-Nitrogen bonds. Some Dialkylamino-derivatives of Titanium and Zirconium" J. Chem. Soc. 1960, 3857-3861. .〕 :TiCl4 + 4 LiNMe2 → Ti(NMe2)4 + 4 LiCl Like many amido complexes, TDMAT is quite sensitive toward water, and its handling requires air-free techniques. The ultimate products of its hydrolysis is titanium dioxide and dimethylamine: :Ti(NMe2)4 + 2 H2O → TiO2 + 4 HNMe2 In a related reaction, the compound undergoes exchange with other amines, evolving dimethylamine. 抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)』 ■ウィキペディアで「Tetrakis(dimethylamido)titanium」の詳細全文を読む スポンサード リンク
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