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Microfabrication is the process of fabrication of miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods. Flat-panel displays and solar cells are also using similar techniques. Miniaturization of various devices presents challenges in many areas of science and engineering: physics, chemistry, materials science, computer science, ultra-precision engineering, fabrication processes, and equipment design. It is also giving rise to various kinds of interdisciplinary research.〔Nitaigour Premchand Mahalik (2006) "Micromanufacturing and Nanotechnology", Springer, ISBN 3-540-25377-7〕 The major concepts and principles of microfabrication are microlithography, doping, thin films, etching, bonding, and polishing. ==Fields of Use== Microfabricated devices include: * Fabrication of integrated circuits (“microchips”) (see semiconductor manufacturing) * Microelectromechanical systems (MEMS), MOEMS, * microfluidic devices (ink jet print heads) * solar cells * Flat Panel Displays (see AMLCD and Thin Film Transistor) * Sensors (micro-sensors) (biosensors, nanosensors) * PowerMEMSs, fuel cells, energy harvesters/scavengers 抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』 ■ウィキペディアで「microfabrication」の詳細全文を読む スポンサード リンク
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